电子探针的研制现状与分析

Present Condition of the Development of Electron Probe Micro-analyzer

摘要:

电子探针分析具有微区、原位、无损、分析速度快、分析元素范围广、定量分析准确度高等特点，是固体物质微区原位元素组成定量分析的主要技术手段，广泛应用于材料、地质、冶金、矿产、电子、生物、考古、空间科学等领域，但我国的电子探针长期依赖于进口，存在着“卡脖子”的风险。 本文回顾了电子探针的研制历史，梳理了国内外电子探针的研制现状，总结了我国电子探针研制存在的问题和短板，指出了电子探针研制的发展趋势，以期为我国电子探针的研制提供借鉴。

Abstract:

Electron probe micro-analyzer has the characteristics of micro-area, in-situ, non-destructive, fast analysis speed, wide range of elements analyzed and high accuracy in quantitative analysis. It is the primary technical means for quantitative analysis of the elemental composition in situ at the micro-area of solid materials. It is widely applied in various fields, including materials, geology, metallurgy, mining, electronics, biology, archaeology and space science. However, electron probe micro-analyzer has long relied on imports, and has a risk of dependence. In this paper, historical development of electron probe micro-analyzer has been reviewed, present condition of domestic and foreign electron probe micro-analyzer development have been summarized, the problems and shortcomings of electron probe micro-analyzer development in China have been identified, and the development trends in electron probe micro-analyzer has been pointed out. It will provide valuable insights for the research and development of electron probe micro-analyzer in China.