Abstract:Regarding high spatial resolution and microanalysis as the core, combining with isotope geochemical analysis technology, in situ microanalysis technology can meet the identification requirements of time, material source and genetic environment in geological process description. In this paper, the characteristics of microin situ analysis technology and basic principle of isotope geochemistry applications have been introduced. Setting zircon UPb dating as an example, development of UPb isotope dating has been reviewed, and the development of SHRIMP technology has been introduced. On these basis, combining with the needs of geoscience research, the development trend of microarea analysis technology in the future has been proposed.