Subsidence prediction and obtained inversion parameters of probability integral method accurately are the key in studying mining subsidence. In this paper, a new prediction approach of dividing the arbitrary polygonal working face into some small triangular areas by using Delaunay triangulation has been put forward. Then, the subsidence caused by mining of each triangular area can be calculated easily. This method has solved the difficulty of subsidence prediction of arbitrary polygonal working face. A new algorithm based on the combination of genetic algorithm and pattern search has been proposed. The algorithm can improve the accuracy and efficiency of inversion of parameters. The software of data processing of surface movement and deformation has been developed. The main function includes process of measured data, subsidence prediction and inversion of optimal parameters. The algorithm and the software are expected to serve for "coal mining under buildings, under railroad and under water", stability evaluation of mining area buildings and land reclamation.